发明名称 METHOD FOR DEPOSITING A DIELECTRIC ONTO A FLOATING GATE FOR STRAINED SEMICONDUCTOR DEVICES
摘要 A method for forming a semiconductor device and a corresponding device are provided. The method includes forming a floating gate device in a process with dual strain layers, and an etch stop layer. An oxide is formed between the floating gate device and a nitride layer above the floating gate.
申请公布号 US2012086068(A1) 申请公布日期 2012.04.12
申请号 US20100898737 申请日期 2010.10.06
申请人 HORCH ANDREW E.;SYNOPSYS INC. 发明人 HORCH ANDREW E.
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
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