| 摘要 |
A method, actuating device, and microsystem device are described for controlling a micromechanical actuator, which has a rechargeable capacitor for generating a mechanical motion of the micromechanical actuator, a memory having a lookup table containing previously computed data of signal shapes for controlling the micromechanical actuator, and a driver circuit having a driver circuit control unit for processing the previously computed data, a power stage for generating the signal shapes, and an output for outputting the signal shapes, corresponding to previously computed data, to the micromechanical actuator's rechargeable capacitor. The micromechanical actuator has a limiting device, between the output of the driver circuit and the micromechanical actuator, which is for limiting a voltage excursion of the signal shapes output by the driver circuit, which are usable for generating the mechanical motion by recharging the micromechanical actuator's rechargeable capacitor. The micromechanical actuator's power consumption is reducible by limiting the voltage excursion.
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