ULTRACLEAN FLUOROELASTOMER SUITABLE FOR USE IN THE MANUFACTURING OF ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a curable fluoroelastomer composition for preparing a perfluoroelastomer.

SOLUTION: The composition includes: (1) a perfluoropolymer having one or more cure-sites selected from a halogen capable of participating in peroxide cure reaction and/or nitrile groups; (2) an organic peroxide and/or a compound, capable curing the perfluoropolymer through the nitrile groups; and (3) optionally a polyunsaturated crosslinking agent. The perfluoropolymer in the composition is essentially free of ionic end groups and the total amount of metal cations in the composition is not more than 10 μg/g perfluoropolymer. The perfluoroelastomers may be obtained from curing the composition in a sufficiently low amount of metal cations so as to make the fluoroelastomer suitable for use in the semiconductor industry.

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