| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray crystal orientation measuring device capable of simultaneously performing plane orientation measurement and notch orientation measurement by one measurement. <P>SOLUTION: An X-ray crystal orientation measuring device includes: a collimator 33 adapted to collimate a continuous X-ray from an X-ray source F and guide the collimated continuous X-ray to a single-crystal sample position; a first two-dimensional detector 31 capable of detecting a Laue image corresponding to a lattice plane (001) of the sample and arranged at a first position; a second two-dimensional detector 32 capable of detecting a Laue image corresponding to a lattice plane (hhl) of the sample and arranged at a second position; and an operational unit adapted to operate a normal vector V<SB POS="POST">001</SB>of the lattice plane (001) based on output of the first two-dimensional detector 31, operate a normal vector V<SB POS="POST">hhl</SB>of the lattice plane (hhl) based on output of the second two-dimensional detector 32, and operate a direction of an azimuth mark based on the vector V<SB POS="POST">001</SB>and the vector V<SB POS="POST">hhl</SB>. The two lattice planes (001) and (hhl) are lattice planes which belong to a crystal zone axis when a crystal orientation to which the azimuth mark is put is defined as the crystal zone axis. <P>COPYRIGHT: (C)2012,JPO&INPIT |
