NOVEL PROCESS FOR MEMS SCANNING MIRROR WITH MASS REMOVE FROM MIRROR BACKSIDE,申请号WO2011US01704-传众专利搜索

发明名称	NOVEL PROCESS FOR MEMS SCANNING MIRROR WITH MASS REMOVE FROM MIRROR BACKSIDE
摘要	Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.
申请公布号	WO2012047284(A2)	申请公布日期	2012.04.12
申请号	WO2011US01704	申请日期	2011.10.04
申请人	MAGIC TECHNOLOGIES, INC.;ADVANCED NUMICRO SYSTEMS, INC.;CHEN, JUN;MAO, GUOMIN;ZHONG, TOM;CAO, WEI;FU, YEE-CHUNG;TORNG, CHYU-JIUH	发明人	CHEN, JUN;MAO, GUOMIN;ZHONG, TOM;CAO, WEI;FU, YEE-CHUNG;TORNG, CHYU-JIUH
分类号	H01L21/00	主分类号	H01L21/00
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