发明名称 COMPLIANT DEVICE FOR NANO-SCALE MANUFACTURING
摘要 The present invention is directed to a compliant device comprising a support body, a floating body, and a plurality of flexure arms. Each of the plurality of transfer arms is connected between the support body and the floating body to transfer a load therebetween in parallel. To that end, the flexure arms having first and second sets of flexure joints. The first set of flexure joints facilitating rotational movement of said flexure arm about a first axis extending along a first direction. The second set of flexure joints arranged to facilitate rotational movement of the flexure arm about a second axis, extending along a second direction that is transverse to the first direction. The flexure joints are revolute joints.
申请公布号 KR101127970(B1) 申请公布日期 2012.04.12
申请号 KR20067027284 申请日期 2005.05.27
申请人 发明人
分类号 H01L21/02;B82Y40/00;G03F7/00;H01L21/00;H01L21/027;H01L41/04;H01L41/06 主分类号 H01L21/02
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