| 摘要 |
<p>An anti-stiction method is proposed in an inertial micro-electro-mechanical device comprising:
- a mobile mass (150), suspended to an armature via spring means (115), comprising at least one mobile electrode; and
- at least one fixed electrode rigidly attached to the armature, each fixed electrode cooperating with one of said at least one mobile electrode to form a pair of electrodes. The anti-stiction method is such that it carries out a step of detecting, for at least one stuck pair of electrodes, a stiction associated to a stiction force and at least one separating step, comprising a step of applying, during a predetermined time period, a predetermined voltage between the electrodes of at least one of said pair or pairs of electrodes, to create an electrostatic force.</p> |
