| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability of an apparatus of attaching/detaching a window by preventing human errors by reducing burden on a worker, while simply and surely executing works in a short time to reduce downtime through all work processes in replacing a window. SOLUTION: The apparatus includes: a window cassette 40 composed of a window 41 and a holding member 42 for holding the window 41; a light path 51 for allowing a laser light to be input/output; and a window cassette holder 50 in which an attachment surface 52 mounted with the window cassette 40 is formed and which is fixed on a chamber 10. The window cassette holder 50 incorporates a built-in shutter mechanism 70 in which the light path 51 is opened in response to the attachment of the window cassette 40 on the attachment surface 52 and the light path 51 is closed in response to the detachment of the window cassette 40 from the attachment surface 52. COPYRIGHT: (C)2009,JPO&INPIT |
