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发明名称
Circulated cooled target
摘要
申请公布号
EP1892314(B1)
申请公布日期
2012.04.11
申请号
EP20060119488
申请日期
2006.08.24
申请人
ATOMIC ENERGY COUNCIL - INSTITUTE OF NUCLEAR ENERGY RESEARCH
发明人
LIN, WUU-JYH;CHANG, MAO-HSUNG;HUANG, PING-YEN;CHEN, JENN-TZONG;DUH, TING-SHIEN;CHEN, DOW-CHE;CHU, KUO-YUAN
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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