Linear motor and stage device

摘要

A linear motor 1 includes a field magnet 2 and an armature 3. The field magnet 2 includes a pair of field magnet yokes 4. Between the field magnet yokes 4, a first magnet row 6 is disposed including, along an X axis direction, a plurality of opposing pairs of X-axis permanent magnets 6a having different polarities. Between the field magnet yokes 4, a second magnet row 7 is disposed to a first side or a second side of the first magnet row 6 in a Y axis direction. The second magnet row 7 includes a pair of opposing Y-axis permanent magnets 7a having different polarities and forming a single row in the Y axis direction. The armature 3 includes a three-phase coil 11a opposite the first magnet row 6 and a single-phase coil 12 opposite the second magnet row 7.