发明名称 Process for manufacturing a composite substrate
摘要 The invention relates to a process for manufacturing a composite substrate comprising bonding a first substrate onto a second semiconducting substrate, characterized in that the process includes, before bonding, the formation of a bonding layer between the first and the second substrate, the bonding layer comprising a plurality of islands distributed over a surface of the first substrate in a determined pattern and separated from one another by regions of a different type, which are distributed in a complementary pattern, wherein the islands are formed via a plasma treatment of the material of the first substrate.
申请公布号 US8153504(B2) 申请公布日期 2012.04.10
申请号 US20080742424 申请日期 2008.03.26
申请人 ALLIBERT FREDERIC;KERDILES SEBASTIEN;SOITEC 发明人 ALLIBERT FREDERIC;KERDILES SEBASTIEN
分类号 H01L21/30;H01L21/46 主分类号 H01L21/30
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