| 摘要 |
PURPOSE: A vacuum decompression drying device and a vacuum decompression drying method thereof are provided to prevent a pressure leakage and the inflow of foreign materials by forming a plurality of through holes on a fixed body and a sealed vacuum compression chamber. CONSTITUTION: A fixed body(120) forms a vacuum dry chamber which is sealed by contacting with a moving body(110). A moving bar(130) vertically moves in the fixed body. A plurality of support pins(131) are arranged on the moving bar to support a substrate. A vacuum pump(152) decompresses the vacuum dry chamber through an exhaust port formed in the vacuum dry chamber. The substrate is transferred to the support pin of the moving bar by inserting the branch unit of an arm between the support pins.
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