发明名称 Lanthanide dielectric with controlled interfaces
摘要 Methods and devices for a dielectric are provided. One method embodiment includes forming a passivation layer on a substrate, wherein the passivation layer contains a composition of silicon, oxygen, and nitrogen. The method also includes forming a lanthanide dielectric film on the passivation layer, and forming an encapsulation layer on the lanthanide dielectric film.
申请公布号 US8153497(B2) 申请公布日期 2012.04.10
申请号 US201113154499 申请日期 2011.06.07
申请人 BHATTACHARYYA ARUP;MICRON TECHNOLOGY, INC. 发明人 BHATTACHARYYA ARUP
分类号 H01L21/20;H01L31/119 主分类号 H01L21/20
代理机构 代理人
主权项
地址