发明名称 |
Configurable PSRO structure for measuring frequency dependent capacitive loads |
摘要 |
A configurable PSRO measurement circuit is used to measure the frequency dependent capacitance of a target through silicon via (TSV) or other conductive structure. Measurements of the target structure are aided by using adjustable resistors and a de-embedding structure to measure the effects of parasitic capacitance, CPAR. Current is measured to both the device under test (DUT) and the de-embedding structure. From these measurements, the frequency dependent capacitance of the DUT is calculated. |
申请公布号 |
US8154309(B2) |
申请公布日期 |
2012.04.10 |
申请号 |
US20090489656 |
申请日期 |
2009.06.23 |
申请人 |
AGARWAL KANAK B.;HAYES JERRY D.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AGARWAL KANAK B.;HAYES JERRY D. |
分类号 |
G01R27/26 |
主分类号 |
G01R27/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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