MANUFACTURING METHOD OF FILM FORMED SUBSTRATE, FILM FORMED SUBSTRATE, AND FILM FORMING APPARATUS

摘要

PURPOSE: A method for manufacturing a film deposition substrate, a film deposition substrate, and a film deposition apparatus are provided to improve the adhesion between a Molybden layer and a glass substrate by depositing a second Molybden layer with a film on a surface of the first Molybden layer after depositing the first Molybden layer, containing a very small amount of oxygen, on the glass substrates with the film. CONSTITUTION: A back electrode layer(3) is formed on a glass substrate(2). The back electrode layer includes a first Molybden layer(3a) deposited on a surface of the glass substrates and a second Molybden layer(3b) deposited on the surface of the first Molybden layer. A CIGS(Copper Indium Gallium Selenide) layer(4) is formed on the second Molybden layer. A buffer layer(5) is formed on the CIGS layer. A transparent electrode layer(6) is formed on the buffer layer.