发明名称 METHOD FOR FABRICATING HIGH EFFICIENCY FLEXIBLE COMPOUND SEMICONDUCTOR THIN FILM SOLAR CELL WITH CHALCOPYRITE SYSTEM
摘要 PURPOSE: A manufacturing method of a high efficiency ductility chalcopyrite system compound semiconductor solar cell is provided to prevent an exfoliation phenomenon of a CIGS(Cu(In,Ga,Al)(Se,S)) layer and crack generation of a lower electrode due to a thermal expansion coefficient mismatch of the CIGS layer, thereby improving manufacturing process efficiency. CONSTITUTION: A sacrificial layer is formed on a substrate. A solar cell structure(200) which includes a diffusion barrier insulating film layer(210) and a thin film solar cell(220) is formed on the upper part of the sacrificial layer. A supporting film is formed on the solar cell structure. The supporting film and the solar cell structure are separated from the substrate by selectively etching the sacrificial layer. The solar cell structure is welded on a different kind of a ductility host substrate(500).
申请公布号 KR20120033435(A) 申请公布日期 2012.04.09
申请号 KR20100094942 申请日期 2010.09.30
申请人 GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 JEONG, YON KIL;MOON, SEUNG HYEON;LEE, YONG TAK;SHIM, HEE SANG;PARK, CHANG YOUNG;KIM, CHAE WOONG
分类号 H01L31/042 主分类号 H01L31/042
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