SILICA MEMBRANE PREPARATION METHOD BY COUNTER FLOW DIFFUSION PROCESS

摘要

PURPOSE: A method for manufacturing silica hydrogen separating membrane based on a counter flow method is provided to accelerate operational speed and to improve the hydrogen separating characteristic of the hydrogen separating membrane. CONSTITUTION: A porous alumina tube is prepared as a support, and the opened pore side of the tube is about 100nm. Alumina sol is coated and thermally treated to the tube to reduce the size of pores in the tube. Silicon supplying source is supplied to the external side of the tube in a reactor using carrier gas. Oxygen is supplied into the tube to deposit silica on the external side of pores of oxygen passing sizes based on a chemical vapor deposition method. The flux of the oxygen is between 0.5 and 5 sccm, and the internal pressure of the tube become in a range between 0.01 and 0.1kgf/cm^2.