| 摘要 |
<p>A stage device, wherein a stage (RST) is allowed to move in three degrees of freedom directions in a two-dimensional plane while floating above a surface plate (16) and holding a reticle, and a frame-shaped member (18) is allowed to move in the three degrees of freedom directions in the two-dimensional plane while floating above the surface plate. The stage comprises a drive mechanism that includes respective pairs of movable elements (28 1 , 28 2 ) that are arranged symmetrically with respect to a neutral plane of the stage, on one side and another side in a second axis direction perpendicular to a first axis direction of an area where the object of the slider is mounted, and respective pairs of stators (1361 to 1382) that in cooperation with the respective pairs of movable elements individually generate a drive force in the first axis direction. .</p> |
