TEMPERATURE MEASURING METHOD AND STORAGE MEDIUM

摘要

PURPOSE: A temperature measuring method and a storage media are provided to accurately measure a temperature of a measurement object even though a thin film is formed in the measurement object. CONSTITUTION: A temperature measuring method is as follows. Light is transmitted from a light source(110) to a measurement point(P) of a measurement object in which a thin film is formed on a substrate. A first interference wave by reflection light from a surface of the substrate and second interference wave by reflection light from the substrate, the thin film, and a rear side of the thin film are measured. A length of a light path from the first interference to second interference is calculated. A thickness of the thin film is calculated based on the intensity of the second interference wave. A length difference between a light path length of the substrate and the calculated light path length is calculated based on the calculated thickness of the thin film. The light path length from the first interference wave to the second interference wave is revised based on the calculated length difference of the light path. A temperature of the measurement object with respect to the measurement point is calculated from the revised light path length.