发明名称 METHOD FOR WAFER LEVEL MOLD AND WAFER STRUCTURE FORMED BY THE SAME
摘要 PURPOSE: A wafer level mold formation method which uses glass fiber and a wafer structure using the same are provided to minimize the difference between thermal expansion coefficients of a wafer and a mold layer, thereby minimizing a bending phenomenon of a molded wafer. CONSTITUTION: A glass substrate(10) is attached to the lower part of a wafer(30) in which a semiconductor chip(40) is arranged. A liquid(50) for a mold is spread on a side surface of the upper part of the semiconductor chip. A glass fiber(60) is loaded on the semiconductor chip in which the liquid is spread. A mold layer is formed by compression molding of the liquid. The glass substrate is separated from the wafer.
申请公布号 KR20120032765(A) 申请公布日期 2012.04.06
申请号 KR20100094275 申请日期 2010.09.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, TAE HWAN
分类号 H01L23/28;H01L23/02 主分类号 H01L23/28
代理机构 代理人
主权项
地址