METHOD FOR MANUFACTURING ELECTRODE FOR VAPOR DEPOSITION PROCESS

摘要

PURPOSE: A method for manufacturing an electrode for a deposition process is provided to remarkably reduce fabrication costs by reducing the number of processes through a forging process. CONSTITUTION: A raw material for manufacturing an electrode is prepared. The raw material is an oxygen free copper or an OFHC(Oxygen Free High Conductivity Copper). The raw material is arranged in a mold of a shape corresponding to the electrode. A head portion(31) and a body portion(32) of the electrode are formed by forging-processing the raw material with the mold. A cooling water inlet(33) is formed at a lower part of the body portion into a predetermined depth.