| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagnetic casting method capable of preventing increase in carbon density while preventing occurrence of a crack in an ingot final solidifying region in electromagnetic casting of the silicon ingot. <P>SOLUTION: In the electromagnetic casting method, an ingot 3 is continuously cast when a silicon raw material 11 is charged into a bottomless cooling crucible 7 to be melted by electromagnetic induction heating from an induction coil 8 and plasma arc heating from a plasma torch 13 inserted in the upper part of the crucible 7 and the molten silicone 12 is solidified while being pulled down from the crucible 7. In a steady period for charging and melting the silicon raw material 11 in the crucible 7 to solidify it, the plasma torch 13 is set to a plasma transferred arc type generating plasma arcs between electrodes of the plasma torch and the molten silicone 12. In a casting final period for stopping charge of the silicon raw material 11 and solidifying the molten silicone 12, the plasma torch 13 is set to a plasma non-transferred arc type generating plasma arcs between the electrodes of the plasma torch. <P>COPYRIGHT: (C)2012,JPO&INPIT |
