发明名称 SINTERED COMPOSITE OXIDE, MANUFACTURING METHOD THEREFOR, SPUTTERING TARGET, TRANSPARENT CONDUCTIVE OXIDE FILM, AND MANUFACTURING METHOD THEREFOR
摘要 Provided are: a sintered complex oxide (2) consisting primarily of zinc, aluminum, titanium, and oxygen; and a manufacturing method therefor. The atomic ratios of the elements constituting said sintered complex oxide satisfy relations (1) through (3). Said sintered complex oxide comprises: particles that consist primarily of zinc oxide, have a mean diameter of 20 µm or less, and have a hexagonal wurtzite structure; and particles that contain aluminum and titanium, have a mean diameter of 5 µm or less, and have a ZnTiO3-like and/or Zn2Ti3O8-like structure. Said sintered complex oxide does not contain particles that have a zinc-aluminate spinel oxide structure in which zinc and aluminum form a solid solution. (1) 0.004 = (Al+Ti)/(Zn+Al+Ti) = 0.055 (2) 0.002 = Al/(Zn+Al+Ti) = 0.025 (3) 0.002 = Ti/(Zn+Al+Ti) = 0.048 (In relations (1) through (3), Al, Ti, and Zn represent the aluminum, titanium, and zinc content (in at.%), respectively.)
申请公布号 WO2012043571(A1) 申请公布日期 2012.04.05
申请号 WO2011JP72092 申请日期 2011.09.27
申请人 TOSOH CORPORATION;KURAMOCHI HIDETO;IIGUSA HITOSHI;SHIBUTAMI TETSUO 发明人 KURAMOCHI HIDETO;IIGUSA HITOSHI;SHIBUTAMI TETSUO
分类号 C04B35/453;C23C14/34;H01B1/08;H01B5/14;H01B13/00 主分类号 C04B35/453
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