POLISHING UNIT AND POLISHING METHOD BY POLISHING UNIT

摘要

Disclosed is a polishing unit wherein a main body part (11) and a lid (12) of a barrel tank (10) are respectively interchangeable, and the lid (12) and the barrel tank (10) can be reliably secured to the main body part (11) of the barrel tank (10) and the barrel tank case (20), respectively. The barrel tank (10) has a lid securing member (14) for securing the lid (12) to the main body part (11). The barrel tank case (20) includes a tray (21) for mounting and holding the barrel tank (10) thereon, a barrel tank securing member (22) for securing the barrel tank (10) to the tray (21), and a pair of guide parts (23) capable of moving the barrel tank securing member (22) in a horizontal direction. The barrel tank securing member (22) includes a pressing member (22a) which is placed over a position facing the tray (21) so as to be able to press the barrel tank (10) vertically downward and presses the barrel tank (10), and, as a positioning member which when the barrel tank securing member (22) is mounted, restricts the movement of the barrel tank securing member (22) using the guide parts (23) as a reference, a convex member (22c) and a protruding member (22d).