申请人 |
CHANG JOSEPHINE B.;CHARNS LESLIE;CUMMINGS JASON E.;GUILLORN MICHAEL A.;HUPKA LUKASZ J.;KOLI DINESH R.;KONNO TOMOHISA;KRISHNAN MAHADEVAIYER;LOFARO MICHAEL F.;NALASKOWSKI JAKUB W.;NODA MASAHIRO;PENIGALAPATI DINESH K.;YAMANAKA TATSUYA;JSR CORPORATION;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHANG JOSEPHINE B.;CHARNS LESLIE;CUMMINGS JASON E.;GUILLORN MICHAEL A.;HUPKA LUKASZ J.;KOLI DINESH R.;KONNO TOMOHISA;KRISHNAN MAHADEVAIYER;LOFARO MICHAEL F.;NALASKOWSKI JAKUB W.;NODA MASAHIRO;PENIGALAPATI DINESH K.;YAMANAKA TATSUYA |