POLISHING AGENT

摘要

This polishing agent is composed of a complex metal oxide which comprises a univalent or bivalent metallic element (that is not a transition metal element) and a transitional metal element, and is used for polishing silicon carbide, corundum aluminium oxide, and gallium nitride. A complex metal oxide containing one, two, or more varieties of transition metallic elements selected from a group including an alkaline metallic element, manganum, cobalt, and nickel is preferred. The complex metal oxide being LiMn2O4, LiCoO2 or LiNiO2 is particularly favorable.