发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The method of manufacturing the semiconductor device includes amorphizing a first region and a second region of a semiconductor substrate by an ion implantation, implanting a first impurity and a second impurity respectively in the first region and the second region, activating the implanted impurities to form a first impurity layer and a second impurity layer, epitaxially growing a semiconductor layer above the semiconductor substrate with the impurity layers formed on, growing a gate insulating film above the first region and the second region, and forming a first gate electrode above the gate insulating film in the first region and the second gate electrode above the gate insulating film in the second region.
申请公布号 US2012083079(A1) 申请公布日期 2012.04.05
申请号 US201113176052 申请日期 2011.07.05
申请人 OH JUNJI;FUJITSU SEMICONDUCTOR LIMITED 发明人 OH JUNJI
分类号 H01L21/336 主分类号 H01L21/336
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