| 摘要 |
<p>[Problem] To provide an atomization device capable of preventing distortion from occurring in a vibration plate during assembling to achieve higher-efficiency atomization of a hydrogen peroxide solution, a longer-life vibration plate, and more constant quality. [Solution] A hydrogen peroxide solution atomization device comprises a reservoir in which a hydrogen peroxide solution is retained, and an atomization unit which atomizes the hydrogen peroxide solution in the reservoir by ultrasonic vibration so that the hydrogen peroxide solution is discharged together with carrier gas, and is characterized in that the atomization unit is provided with an accommodation portion which retains therein propagation liquid for propagating the ultrasonic vibration, and the reservoir is provided with an opening which penetrates a bottom plate and communicates with the accommodation portion, a groove which is continuously formed around the opening in the outer surface of the bottom plate, an elastic seal member which is in contact with the bottom surface and inner peripheral surface close to the opening of the groove and is disposed so as to protrude from the outer surface of the bottom plate, a vibration plate which covers the opening and the groove, and a securing plate which presses and secures the vibration plate to the elastic seal member and the outer surface of the bottom plate so that the vibration plate seals the opening.</p> |
