| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a freezing pin chuck which equally allows retention of drops of a freezing liquid sufficient for solidifying/fixing a workpiece such as a wafer or a mask substrate at all pin heads on a chuck plate and enables reduction in the usage amount of the required freezing liquid. <P>SOLUTION: In a freezing pin chuck, many pins 2 are separately disposed on a top surface of a chuck plate, and a pin head has a surface roughness Ra of 0.1 μm or more to 0.5 μm or less or a depression is provided for the pin head. <P>COPYRIGHT: (C)2012,JPO&INPIT |
