发明名称 PRIMING TREATMENT METHOD AND PRIMING TREATMENT APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To further save a cleaning liquid to be used for priming treatment, to shorten drying treatment time, and to prolong the lives of a tool for cleaning treatment and/or a tool for drying treatment. <P>SOLUTION: A priming treatment apparatus comprises a roughly cleaning treatment part 18 having a cleaning pad 20 on the circumference of a priming roller 14 along a rotation direction, a finishing cleaning treatment part 38 having a 2-fluid jet nozzle 42, a droplet removal part 48 having a wiping pad 52, and a drying blow part 50 having a gap 58 and a gas nozzle 60. The cleaning pad 20 and wiping pad 52 are switched between a first position at which the pads touch the outer circumferential face of the priming roller 14 and a second position retracted from there by a cleaning pad transferring mechanism 24 and a wiping pad transferring mechanism 56. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012066244(A) 申请公布日期 2012.04.05
申请号 JP20110235712 申请日期 2011.10.27
申请人 TOKYO ELECTRON LTD;HIRATA CORP 发明人 MIYAZAKI FUMIHIRO;NAKAMITSU TAKASHI;YAMAZAKI TAKESHI;ONIZUKA YASUYUKI;NAGATA YOSHITOSHI
分类号 B05D1/26;B05C5/02;B05C11/10 主分类号 B05D1/26
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