| 发明名称 |
RESIN COMPOSITION FOR NANOIMPRINT, AND METHOD FOR FORMING STRUCTURE |
| 摘要 |
A resin composition for nanoimprint includes a cationically polymerizable compound that has crystalline characteristics and is solid at ordinary temperature, and a photo cationic polymerization initiator.
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| 申请公布号 |
US2012080826(A1) |
申请公布日期 |
2012.04.05 |
| 申请号 |
US201013377135 |
申请日期 |
2010.05.13 |
| 申请人 |
SAITO YOSHIKAZU;CANON KABUSHIKI KAISHA |
发明人 |
SAITO YOSHIKAZU |
| 分类号 |
B29C59/16;C09D163/02 |
主分类号 |
B29C59/16 |
| 代理机构 |
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