发明名称 DEVICES FOR METHODOLOGIES RELATED TO WAFER CARRIERS
摘要 Disclosed are systems, devices and methodologies for handling wafers in wafer processing operations through use of wafer carriers. In an example situation, a wafer carrier can be configured as a plate to allow bonding of a wafer thereto to provide support for the wafer during some processing operations. Upon completion of such operations, the processed wafer can be separated from the support plate so as to allow further processing. Various devices and methodologies related to such wafer carriers for efficient handling of wafers are disclosed.
申请公布号 US2012080832(A1) 申请公布日期 2012.04.05
申请号 US201113153954 申请日期 2011.06.06
申请人 WOODARD ELENA B.;BERKOH DANIEL K.;ZAPP DAVID J.;CANALE STEVE;SKYWORKS SOLUTIONS, INC. 发明人 WOODARD ELENA B.;BERKOH DANIEL K.;ZAPP DAVID J.;CANALE STEVE
分类号 B23Q3/18;B32B3/02;B32B17/00;F24J3/00 主分类号 B23Q3/18
代理机构 代理人
主权项
地址