| 发明名称 |
Method for Manufacturing a Composite Wafer Having a Graphite Core, and Composite Wafer Having a Graphite Core |
| 摘要 |
According to an embodiment, a composite wafer includes a carrier substrate having a graphite core and a monocrystalline semiconductor layer attached to the carrier substrate. |
| 申请公布号 |
US2012080690(A1) |
申请公布日期 |
2012.04.05 |
| 申请号 |
US20100894344 |
申请日期 |
2010.09.30 |
| 申请人 |
BERGER RUDOLF;GRUBER HERMANN;LEHNERT WOLFGANG;RUHL GUENTHER;FOERG RAIMUND;MAUDER ANTON;SCHULZE HANS-JOACHIM;INFINEON TECHNOLOGIES AUSTRIA AG |
发明人 |
BERGER RUDOLF;GRUBER HERMANN;LEHNERT WOLFGANG;RUHL GUENTHER;FOERG RAIMUND;MAUDER ANTON;SCHULZE HANS-JOACHIM |
| 分类号 |
H01L29/24;H01L21/20;H01L21/30;H01L29/02 |
主分类号 |
H01L29/24 |
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