摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor optical waveguide element in which occurrence of light loss and increase in consumption power are suppressed, and to provide a method of manufacturing the same. <P>SOLUTION: A semiconductor optical waveguide element of a buried type provided on a substrate comprises: an active portion having an active core layer and a cladding region formed on the active core layer; a core layer that is connected to the active portion and is formed in a taper shape so as to enlarge a spot size of light output from the active core layer of the active portion; and a spot size converter having a cladding region formed on the core layer. The thickness of the cladding region on the core layer is thicker than that of the cladding region on the active core layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |