| 摘要 |
A method of manufacturing a semiconductor device includes forming a first insulating interlayer positioned above one surface of a substrate, forming a first hole extended from the surface of the first insulating interlayer to midway of the substrate, forming a through-electrode in the first hole, forming an electro-conductive pattern positioned on the surface of the first insulating interlayer, and connected to one end of the through-electrode, making the other end of the through-electrode expose, by removing the other surface of the substrate, and forming a connection terminal connected to the other end of the through-electrode, on the other surface of the substrate.
|
