LASER ILLUMINATION SYSTEM WITH REDUCED SPECKLE

摘要

A despeckling device and method in which an optical path difference staircase element is disposed between a fly's eye lens array and the image plane in a position near the focus position of the fly's eye lens array, and a laser generating unit generates and transmits pulsed laser beams to the optical path difference staircase element, wherein the pulsed laser beams are driven at a very short pulsed rate.