MICROWAVE GENERATION DEVICE, DRIVING METHOD OF DEVICE THEREOF, AND WASTE GAS REMOVAL SYSTEM

摘要

Disclosed are a microwave generation device, a driving method of the device thereof, and a waste gas removal system. The microwave generation device comprises: a magnetron which generates a microwave; and a power supply circuit which generates a plurality of rectified high voltages that have different phases for driving said magnetron. Thus, the invention stably drives the magnetron at a high output with a low manufacturing cost, and extends the duration of the magnetron.