| 摘要 |
PURPOSE: A light irradiating device and a light irradiating method are provided to certainly form a stripe pattern with desired anisotropic features and obtain a pattern with high resolution. CONSTITUTION: A first mask pattern(38A) of a first polarized light irradiating unit(60A) and a second mask pattern(38B) of a second polarized light irradiating unit(60B) are complementarily formed. A light transmitting unit of the first mask pattern is arranged with a light shielding unit of the second mask pattern in a direction of transferring an irradiated object(W). The light shielding pattern of the first mask pattern is arranged with a light transmitting unit of the second mask pattern in the direction of transferring the irradiated object.
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