| 摘要 |
<p>PURPOSE: A wafer supply system is provided to improve spatial utilization of semiconductor facilities by supplying a wafer in a vertical direction with respect to a movement direction of a conveyor belt. CONSTITUTION: A wafer supply part supplies and laminates wafers. A wafer extraction part successively extracts the wafers laminated on the wafer supply part. A wafer transfer part(4000) transfers the wafer extracted from the wafer extraction part to a predetermined transfer direction. A wafer alignment part(5000) aligns a direction or an interval of the wafer transferred from the wafer transfer part. A controller controls the wafer alignment part, the wafer transfer part, the wafer extraction part, and the wafer supply part.</p> |
