| 摘要 |
<p>PURPOSE: A substrate loading apparatus of a diffusion apparatus for manufacturing a solar battery is provided to improve process efficiency by successively or simultaneously performing a plurality of diffusion processes through a loader station. CONSTITUTION: A loader station(20) is comprised of a transfer unit(21), an opening/closing part(25), a boat rack(27), and a boat(30). The transfer unit is installed on a main frame(12). The opening/closing part is fixed to the transfer unit. One end of the boat rack is extended for a predetermined length by being combined with the transfer unit. The boat is mounted on the moat rack.</p> |
