| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection device and a visual inspection method for enabling even an operator who is not familiar with image processing or the like to easily and accurately inspect the property of the inspection surface of an inspection object while reducing costs. <P>SOLUTION: The visual inspection device includes: an illumination device 1; an imaging device 2; and a display device 3. The illumination device 1 is configured to irradiate an inspection surface Wa of an inspection object W with the rays of light with varying density so that the configurations of varying density generated by the reflected rays of light on the inspection surface Wa are different from each other according to the property of the inspection surface Wa with respect to the configurations of the varying density of the rays of light incident on the inspection surface Wa. Therefore, this visual inspection device is configured to perform inspection not by imaging the state of the processed grids of the inspection surface Wa itself but by irradiating the inspection surface Wa with the rays of light with varying density in such configurations that the rays of light with varying density are reflected on the inspection surface Wa. <P>COPYRIGHT: (C)2012,JPO&INPIT |
