| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate conveyance device in which there is no friction between a conveyance roller and a glass substrate when the glass substrate is positioned. <P>SOLUTION: A substrate conveyance device is used at delivery or receiving of the glass substrate in a processing unit or between the processing units. In the substrate conveyance device, a roller for mounting and conveying the glass substrate comprises: a movable groove arranged in a vertical direction to a rotating direction of the roller in an inner peripheral portion of the roller; a movable part support body having a movable part in which the tip thereof is moved along the movable groove by a ring when the glass substrate is mounted and positioned on the roller; and a stopper for rotating the roller while the roller is held at a state inclined to the positioning direction of the glass substrate by moving the movable part along the movable groove. The substrate conveyance device comprises one or more rollers on a shaft, and further a plurality of the shafts. <P>COPYRIGHT: (C)2012,JPO&INPIT |
