发明名称 SINTERED OXIDE MATERIAL, METHOD FOR MANUFACTURING SAME, SPUTTERING TARGET, OXIDE TRANSPARENT ELECTRICALLY CONDUCTIVE FILM, METHOD FOR MANUFACTURING SAME, AND SOLAR CELL
摘要 The present invention provides an oxide sintered material (2) constituted from a crystal phase of a bixbyite-type oxide phase and a perovskite-type oxide phase or a bixbyite-type oxide crystal phase. The crystal phase has indium, tin, and strontium for constituent elements, and the atomic ratio of the indium, tin, and strontium content satisfies formulas (1) and (2). Also provided is a sputtering target. Also provided are an oxide transparent electrically conductive film formed using the sputtering target and a solar cell. Sn/(In + Sn + Sr) = 0.01 - 0.11 (1) Sr/(In + Sn + Sr) = 0.0005 - 0.004 (2) [In formulas (1) and (2), In, Sn, and Sr indicate content (atomic percent) for indium, tin, and strontium, respectively.]
申请公布号 WO2012043570(A1) 申请公布日期 2012.04.05
申请号 WO2011JP72091 申请日期 2011.09.27
申请人 TOSOH CORPORATION;KURAMOCHI HIDETO;MATSUMARU KEITARO;AKIIKE RYO;UTSUMI KENTARO;SHIBUTAMI TETSUO 发明人 KURAMOCHI HIDETO;MATSUMARU KEITARO;AKIIKE RYO;UTSUMI KENTARO;SHIBUTAMI TETSUO
分类号 C04B35/00;C23C14/34;H01B1/08;H01B5/14;H01B13/00 主分类号 C04B35/00
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