发明名称 Measuring Minority Carrier Lifetime
摘要 An apparatus includes a member including a ferromagnetic material, an inductance-capacitance resonant circuit, a substrate disposed relative to the member, and a plurality of radiation sources. The member includes a post disposed at its center and a surface extending to an outer wall. The member defines a gap between the post and the outer wall. The inductance-capacitance resonant circuit is configured to resonate at a measurement frequency. The circuit includes an inductor disposed relative to the post. The substrate is disposed relative to the member. The substrate is electromagnetically coupled to the inductor. The plurality of radiation sources is disposed radially outward from and circumferentially around the post of the member. The apparatus can be used to simultaneously measure conductance (inverse sheet resistance), steady state photoconductance, true steady state minority carrier lifetime, photoconductance build-up and photoconductance decay lifetime.
申请公布号 US2012081132(A1) 申请公布日期 2012.04.05
申请号 US201113080451 申请日期 2011.04.05
申请人 MACHUCA FRANCISCO;CHIARELLO RONALD;MILLER G. LORIMER;FOSTER JOSEPH W.;TIGWELL DAVID C.;MKS INSTRUMENTS, INC. 发明人 MACHUCA FRANCISCO;CHIARELLO RONALD;MILLER G. LORIMER;FOSTER JOSEPH W.;TIGWELL DAVID C.
分类号 G01R27/28;H01F17/06 主分类号 G01R27/28
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