发明名称 |
STATICALLY -BALANCED COMPLIANT MICROMECHANISMS |
摘要 |
Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant first segment or segments within the substrate or substrate parts with a predefined positive stiffness, wherein the first segment or segments is or are statically balanced. This is embodied by applying a second segment or segments within the substrate or substrate parts that provide a balancing force to the first segment or segments so as to counteract at least in a predefined working range of the first segment or segments the said predefined positive stiffness. |
申请公布号 |
WO2012015301(A3) |
申请公布日期 |
2012.04.05 |
申请号 |
WO2011NL50539 |
申请日期 |
2011.07.22 |
申请人 |
TECHNISCHE UNIVERSITEIT DELFT;STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN;TOLOU, NIMA;HERDER, JUSTUS |
发明人 |
TOLOU, NIMA;HERDER, JUSTUS |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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