THERMALLY SPRAYED COATING-COATED MEMBER EXCELLENT IN CORROSION RESISTANCE AND PLASMA EROSION RESISTANCE, AND METHOD FOR PREVENTING CRACK OCCURRENCE IN THERMALLY SPRAYED COATING HAVING SUBJECTED TO HIGH-ENERGY IRRADIATION TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a thermally sprayed coating-coated member that is excellent in resistance against corrosion due to halogen compounds and plasma erosion and in resistance against corrosion due to a cleaning solution frequently and repeatedly used for cleaning apparatus members and is useful as a semiconductor processing apparatus member.

SOLUTION: The member has an airtight remelted layer formed by a high-energy irradiation treatment conducted on a surface of a thermally sprayed coating formed using a cermet material composed of a metal and an oxide. Here, through holes present on the surface of the coated film at an initial stage of film forming are eliminated and cracks are prevented, thereby converting the surface of a top coat (thermally sprayed coating) into a cermet sprayed coating film that is substantially free of holes and is excellent in corrosion resistance and plasma erosion resistance.

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