| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece which suppresses the CI value and reduces the size without deteriorating the vibration characteristics, and to provide a piezoelectric device using the piezoelectric vibration piece. <P>SOLUTION: A vibration piece includes a base part 51 formed by a piezoelectric material, multiple vibration arms 35 and 36 which are integrally formed with the base part and extend so as to be parallel to each other, long grooves 33 and 34 formed along the longitudinal direction of each vibration arm, and electrodes for excitation formed in the long groove. In each vibration arm, the rigidity is highest at the base part side and reduces gradually toward the distal end side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
