发明名称 Substrate comprising different types of surfaces and method for obtaining such substrates
摘要 The substrate has a support (1) presenting crystalline defect density greater than 10 power 5/cubic cm, where the size of crystalline defects is greater than 10 nm. A continuous insulating layer (2) is placed on a region (4) of a front surface of the support. A superficial layer (3) is positioned on the insulating layer. A supplementary layer (6) is placed on another region (5) of the front surface of the support, where the supplementary layer comprises an exposed surface (15) above the latter region. The supplementary layer has a sufficient thickness for burying the defects of the support. An independent claim is also included for a method for fabricating a semi-conductor structure.
申请公布号 KR101132318(B1) 申请公布日期 2012.04.05
申请号 KR20107027233 申请日期 2009.05.18
申请人 发明人
分类号 H01L27/12;H01L27/04 主分类号 H01L27/12
代理机构 代理人
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