| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a susceptor appropriate for measuring temperature at an arbitrary position in a ceramic plate. <P>SOLUTION: In a susceptor 10, first and second element wires 51, 52 disposed in the disc-shaped ceramic plate 20, with mutually different material composition and having heat resistance to the sinter temperature of the ceramic plate 20 or higher, and a thermocouple 50, having a temperature measurement portion 50a formed by bonding each tip of the element wires 51, 52, are buried in the form of element wires intact. Because in the susceptor 10 each of the element wires 51, 52 of the thermocouple 50 has heat resistance to the sinter temperature of the ceramic plate 20 or higher, a compact can be sintered after the thermocouple 50 is buried into the compact before the ceramic plate 20 is sintered. <P>COPYRIGHT: (C)2012,JPO&INPIT |
