| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a thermal head with high heating efficiency and stable quality. <P>SOLUTION: A method of manufacturing a thermal head includes: a concave portion forming step SA1 of forming a concave portion opened in one surface of at least one of a planar support substrate and a planar upper substrate disposed on the support substrate in a stacked state; a measurement step SA2 of measuring a width dimension of the concave portion formed in the concave portion forming step SA1; a bonding step SA4 of bonding the support substrate with the upper substrate in the stacked state so as to close the opening of the concave portion; a thinning step SA5 of thinning the upper substrate bonded onto the support substrate in the bonding step SA4 to a thickness specified on the basis of the width dimension of the concave portion measured in the measurement step SA2; and a resistor forming step SA6 of forming a heating resistor on the surface of the thinned upper substrate in a region opposed to the concave portion. <P>COPYRIGHT: (C)2012,JPO&INPIT |
